Minimum Contamination due to corrosion resistant surface treatment. Low cost of ownership due to higher cycle life. The vavles shown in the picture are for CVD- and Plasma etching systems.
Description:
The surface coating is selected according to the application. The increased outgassing rate has to be considered when defining the pumps. Minimum contamination can be abtained by surface treatment and /or using a valve heater.
Engineering with VAT:
Our engineers are experienced in solutions concerning:
- sealing technology with surface treated valves
- selection and treatment of corrosion resistant sealing matierials
- reduction of maintenance costs by means of modular spare parts concept
